Effect of Dopant Concentrations and Annealing Conditions on the Electrically Active Profiles and Lattice Damage in Al Implanted 4H-SiC
- 期刊名称Materials Science Forum
- 作者Weng, Ming Hung; Roccaforte, Fabrizio; Giannazzo, Filippo; Di Franco, Salvatore; Bongiorno, Corrado; Saggio, Mario; Raineri, Vito
- 电子ISSN1662-9752
- 文件大小5317.22KB
- 发表时间2010-4
- DOI10.4028/www.scientific.net/MSF.645-648.713
- 页码713-716
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