ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - An Overview of Current Research on Simultaneous Double Side Grinding of Silicon Wafers
Lin, Bin; Li, Zhichao; Sun, Wangping; Zhang, Xiaohong
- 作者Lin, Bin; Li, Zhichao; Sun, Wangping; Zhang, Xiaohong
- 印刷ISSN1938-5862
- 文件大小628.51KB
- 发表时间2010
- DOI10.1149/1.3360754
- 页码1087-1092