Influence of Target Current on the Structure of Ti-Doped DLC Films
- 期刊名称Advanced Materials Research
- 作者Wang, Cheng Biao; Fu, Zhi Qiang; Yue, Wen; Peng, Zhi Jian; Yu, Xiang; Lin, Song Sheng; Dai, Ming Jiang
- 电子ISSN1662-8985
- 文件大小606.89KB
- 发表时间2010-4
- DOI10.4028/www.scientific.net/amr.105-106.451
- 页码451-454
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