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Optical Properties of Antireflective Subwavelength Structures on 4H-SiC for UV Photodetectors

Hirabayashi, Yasuo; Kaneko, Satoru; Akiyama, Kensuke; Yasui, Manabu; Sakurazawa, Keitaro

期刊名称Materials Science Forum
作者Hirabayashi, Yasuo; Kaneko, Satoru; Akiyama, Kensuke; Yasui, Manabu; Sakurazawa, Keitaro
电子ISSN1662-9752
文件大小705.90KB
发表时间2010-4
DOI10.4028/www.scientific.net/MSF.645-648.1073
页码1073-1076