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Ultra-shallow junctions formed by quasi-epitaxial growth of boron and phosphorous-doped silicon films at 175 °C by rf-PECVD

Ultra-shallow junctions formed by quasi-epitaxial growth of boron and phosphorous-doped silicon films at 175 °C by rf-PECVD

M. Labrune; M. Moreno; P. Roca i Cabarrocas
  • 作者M. Labrune; M. Moreno; P. Roca i Cabarrocas
  • 卷第518卷
  • 期第9期
  • 印刷ISSN0040-6090
  • 文件大小486.44KB
  • 发表时间2010
  • DOI10.1016/j.tsf.2009.09.143
  • 页码2528-2530
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