ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Ultra-Low Temperature Deposition of Copper Seed Layers by PEALD
- 作者Mao, Jiajun; Eisenbraun, Eric; Omarjee, Vincent; Korolev, Andrey; Lansalot, Clement; Dussarrat, Christian
- 印刷ISSN1938-5862
- 文件大小617.93KB
- 发表时间2010
- DOI10.1149/1.3501039
- 页码125-135
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