SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Advances in Resist Materials and Processing Technology XXVII - New self-assembly strategies for next generation lithography
Schwartz, Evan L.; Bosworth, Joan K.; Paik, Marvin Y.; Ober, Christopher K.; Allen, Robert D.
- 作者Schwartz, Evan L.; Bosworth, Joan K.; Paik, Marvin Y.; Ober, Christopher K.; Allen, Robert D.
- 卷第7639卷
- 印刷ISSN0277-786X
- 文件大小1005.57KB
- 发表时间2010
- DOI10.1117/12.848409