3D-интеграция - один из возможных путей опережающего развития отечественной микроэлектроники
- 期刊名称Компоненты и Технологии
- 作者Хохлун Андрей
- 卷第12卷
- 期第113期
- 印刷ISSN2079-6811
- 文件大小428.90KB
- 发表时间2010
- DOI10.0000/cyberleninka.ru/article/n/3d-integratsiya-odin-iz-vozmozhnyh-putey-operezhayuschego-razvitiya-otechestvennoy-mikroelektroniki
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