Fabrication and testing of a SU-8 thermal flow sensor
- 作者R. Vilares; C. Hunter; I. Ugarte; I. Aranburu; J. Berganzo; J. Elizalde; L.J. Fernandez
- 卷第147卷
- 期第2期
- 印刷ISSN0925-4005
- 文件大小938.43KB
- 发表时间2010
- DOI10.1016/j.snb.2010.03.054
- 页码411-417
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