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[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - MEMS resonators with extremely low vibration and shock sensitivity

[IEEE 2011 IEEE Sensors - Limerick, Ireland (2011.10.28-2011.10.31)] 2011 IEEE SENSORS Proceedings - MEMS resonators with extremely low vibration and shock sensitivity

Kim, Bongsang; Olsson, Roy H.; Smart, Kevin; Wojciechowski, Kenneth E.

作者Kim, Bongsang; Olsson, Roy H.; Smart, Kevin; Wojciechowski, Kenneth E.
文件大小965.08KB
发表时间2011
DOI10.1109/icsens.2011.6127186
页码606-609

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