Planar diffuser/nozzle micropumps with extremely thin polyimide diaphragms
- 作者Yingwei Liu; Hiroki Komatsuzaki; Satomitsu Imai; Yasushiro Nishioka
- 卷第169卷
- 期第2期
- 印刷ISSN0924-4247
- 文件大小958.98KB
- 发表时间2011
- DOI10.1016/j.sna.2011.02.009
- 页码259-265
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