A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process
Logan, A.S.; Wong, L.L.P.; Yeow, J.T.W.
- 作者Logan, A.S.; Wong, L.L.P.; Yeow, J.T.W.
- 卷第16卷
- 期第5期
- 印刷ISSN1083-4435
- 电子ISSN1941-014X
- 文件大小489.95KB
- 发表时间2011
- DOI10.1109/tmech.2011.2159732
- 页码861-865