Numerical simulation and design of a new microwave annular waveguide plasma source—I: Simulations without the plasma parameters
- 作者Fan Liu; Jianhua Wang; Songyuan Dai
- 卷第24卷
- 期第6期
- 印刷ISSN0894-3370
- 电子ISSN1099-1204
- 文件大小359.85KB
- 发表时间2011
- DOI10.1002/jnm.797
- 页码526-534