Crystal orientation control of polycrystalline TiN thin films using ZnO under layers deposited by magnetron sputtering

• 作者Kazuhiro Kato; Hideo Omoto; Atsushi Takamatsu; Takao Tomioka
• 卷第258卷
• 期第2期
• 印刷ISSN0169-4332
• 文件大小1146.02KB
• 发表时间2011
• DOI10.1016/j.apsusc.2011.07.098