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Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering

Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering

M. Chandra Sekhar; P. Kondaiah; S.V. Jagadeesh Chandra; G. Mohan Rao; S. Uthanna

作者M. Chandra Sekhar; P. Kondaiah; S.V. Jagadeesh Chandra; G. Mohan Rao; S. Uthanna
卷第258卷
期第5期
印刷ISSN0169-4332
文件大小1437.60KB
发表时间2011
DOI10.1016/j.apsusc.2011.10.047

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