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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Sacrificial microchannel sealing by glass-frit reflow for Chip Scale Atomic Magnetometer

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Sacrificial microchannel sealing by glass-frit reflow for Chip Scale Atomic Magnetometer

Tsujimoto, K.; Hirai, Y.; Sugano, K.; Tsuchiya, T.; Tabata, O.

作者Tsujimoto, K.; Hirai, Y.; Sugano, K.; Tsuchiya, T.; Tabata, O.
文件大小3878.54KB
发表时间2011
DOI10.1109/memsys.2011.5734438
页码368-371

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