Reactive Atom Plasma for Rapid Figure Correction of Optical Surfaces
- 期刊名称Key Engineering Materials
- 作者Castelli, Marco; Jourdain, Renaud; Morantz, Paul; Shore, Paul
- 卷第496卷
- 电子ISSN1662-9795
- 文件大小659.45KB
- 发表时间2011-12
- DOI10.4028/www.scientific.net/KEM.496.182
- 页码182-187
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