[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators
Rahafrooz, Amir; Pourkamali, Siavash
- 作者Rahafrooz, Amir; Pourkamali, Siavash
- 文件大小1172.42KB
- 发表时间2011
- DOI10.1109/MEMSYS.2011.5734536
- 页码760-763