[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting
- 作者Aktakka, Ethem Erkan; Peterson, Rebecca L.; Najafi, Khalil
- 文件大小1866.68KB
- 发表时间2011
- DOI10.1109/TRANSDUCERS.2011.5969857
- 页码1649-1652
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