Characterization of hydrogenated amorphous carbon thin films by end-Hall ion beam deposition
Y. Tang; Y.S. Li; Q. Yang; A. Hirose
- 作者Y. Tang; Y.S. Li; Q. Yang; A. Hirose
- 卷第257卷
- 期第10期
- 印刷ISSN0169-4332
- 文件大小481.01KB
- 发表时间2011
- DOI10.1016/j.apsusc.2010.12.129
- 页码4699-4705