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[IEEE 2011 3rd Asia Symposium on Quality Electronic Design (ASQED 2011) - Kuala Lumpur, Malaysia (2011.07.19-2011.07.20)] 2011 3rd Asia Symposium on Quality Electronic Design (ASQED) - Effect of heater geometry on the high temperature distribution on a MEMS micro-hotplate

[IEEE 2011 3rd Asia Symposium on Quality Electronic Design (ASQED 2011) - Kuala Lumpur, Malaysia (2011.07.19-2011.07.20)] 2011 3rd Asia Symposium on Quality Electronic Design (ASQED) - Effect of heater geometry on the high temperature distribution on a MEMS micro-hotplate

Sidek, O.; Ishak, M. Z.; Khalid, M. A.; Abu Bakar, M. Z.; Miskam, M. A.

作者Sidek, O.; Ishak, M. Z.; Khalid, M. A.; Abu Bakar, M. Z.; Miskam, M. A.
文件大小812.83KB
发表时间2011
DOI10.1109/asqed.2011.6111709
页码100-104

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