[IEEE 2011 Defense Science Research Conference And Expo (DSR) - Singapore, Singapore (2011.08.3-2011.08.5)] 2011 Defense Science Research Conference and Expo (DSR) - Position sensing and electrostatic actuation circuits for 2-D scanning MEMS micromirror

Pham, Duy-Dong; Singh, Ravinder Pal; Dan-Lei Yan, ; Kei-Tee Tiew, ; Bernal, Olivier Daniel; Langer, Tal; Hirshberg, Arnon; Minkyu Je,

作者Pham, Duy-Dong; Singh, Ravinder Pal; Dan-Lei Yan, ; Kei-Tee Tiew, ; Bernal, Olivier Daniel; Langer, Tal; Hirshberg, Arnon; Minkyu Je,
文件大小1478.66KB
发表时间2011
DOI10.1109/dsr.2011.6026861
页码1-4

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