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Abrasive rolling effects on material removal and surface finish in chemical mechanical polishing analyzed by molecular dynamics simulation

Abrasive rolling effects on material removal and surface finish in chemical mechanical polishing analyzed by molecular dynamics simulation

Si, Lina; Guo, Dan; Luo, Jianbin; Lu, Xinchun; Xie, Guoxin

期刊名称Journal of Applied Physics
作者Si, Lina; Guo, Dan; Luo, Jianbin; Lu, Xinchun; Xie, Guoxin
卷第109卷
期第8期
印刷ISSN0021-8979
文件大小6351.45KB
发表时间2011
DOI10.1063/1.3575177

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