The evolution of vacancy-type defects in silicon-on-insulator structures studied by positron annihilation spectroscopy
- 期刊名称Journal of Applied Physics
- 作者Coleman, P. G.; Nash, D.; Edwardson, C. J.; Knights, A. P.; Gwilliam, R. M.
- 卷第110卷
- 期第1期
- 印刷ISSN0021-8979
- 文件大小453.59KB
- 发表时间2011
- DOI10.1063/1.3605487
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