[IEEE 2011 American Control Conference - San Francisco, CA (2011.6.29-2011.7.1)] Proceedings of the 2011 American Control Conference - Dependence of film surface roughness on surface migration and lattice size in thin film deposition
- 作者Jianqiao Huang, ; Gangshi Hu, ; Orkoulas, Gerassimos; Christofides, Panagiotis D.
- 文件大小130.49KB
- 发表时间2011
- DOI10.1109/acc.2011.5991154
- 页码2957-2962
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