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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Conformal coating of poly(glycidyl methacrylate) as a lithographic polymer by initiated chemical vapor deposition

Yoshida, S.; Kobayashi, T.; Kumano, M.; Esashi, M.
  • 作者Yoshida, S.; Kobayashi, T.; Kumano, M.; Esashi, M.
  • 文件大小1092.20KB
  • 发表时间2011
  • DOI10.1109/transducers.2011.5969537
  • 页码994-997
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