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Effect of nitrogen flow ratio on the structural and optical properties of aluminum nitride thin films

Effect of nitrogen flow ratio on the structural and optical properties of aluminum nitride thin films

Shinho Cho

作者Shinho Cho
卷第326卷
期第1期
印刷ISSN0022-0248
文件大小674.05KB
发表时间2011
DOI10.1016/j.jcrysgro.2011.01.092
页码179-182

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