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Denuded Zone Formation in Germanium Codoped Heavily Phosphorus-Doped Czochralski Silicon

Denuded Zone Formation in Germanium Codoped Heavily Phosphorus-Doped Czochralski Silicon

Lin, Li-Xia; Chen, Jia-He; Wu, Peng; Zeng, Yu-Heng; Ma, Xiang-Yang; Yang, De-Ren

期刊名称Chinese Physics Letters
作者Lin, Li-Xia; Chen, Jia-He; Wu, Peng; Zeng, Yu-Heng; Ma, Xiang-Yang; Yang, De-Ren
卷第28卷
期第3期
印刷ISSN0256-307X
电子ISSN1741-3540
文件大小1496.05KB
发表时间2011-03
DOI10.1088/0256-307X/28/3/036104

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