Design of a Topology Nano-Positioning Stage
Chen, Tao; Chen, Li Guo; Pan, Ming Qiang; Sun, Li Ning
- 期刊名称Advanced Materials Research
- 作者Chen, Tao; Chen, Li Guo; Pan, Ming Qiang; Sun, Li Ning
- 电子ISSN1662-8985
- 文件大小456.13KB
- 发表时间2011-2
- DOI10.4028/www.scientific.net/amr.211-212.891
- 页码891-894