Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films

• 作者H. Nazeer; L.A. Woldering; L. Abelmann; M.D. Nguyen; G. Rijnders; M.C. Elwenspoek
• 卷第88卷
• 期第8期
• 印刷ISSN0167-9317
• 文件大小369.58KB
• 发表时间2011
• DOI10.1016/j.mee.2011.01.028
• 页码2345-2348