![[IEEE 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Singapore (2009.07.14-2009.07.17)] 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Simulation of the velocity distribution for immersion lithography]()
[IEEE 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Singapore (2009.07.14-2009.07.17)] 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Simulation of the velocity distribution for immersion lithographyHui Chen, ; WenYu Chen, ; Zou, Jun; Ruan, XiaoDong; Xin Fu, · 2009