Research of Micro-Accelerometer Based on MOEMS
- 期刊名称Applied Mechanics and Materials
- 作者En, De; Zhang, Ning Bo; Feng, Jie Yu; Wang, Xiao Bin; Wang, Ning Ning
- 电子ISSN1662-7482
- 文件大小248.08KB
- 发表时间2011-12
- DOI10.4028/www.scientific.net/AMM.143-144.553
- 页码553-557
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