Influence of Substrate Temperature on the Structural, Electrical and Optical Properties of Al-Doped ZnO Films by RF Magnetron Sputtering
Sun, Yi Hua; Li, Chen Hui; Xiong, Wei Hao; Huang, Cai Hua
- 期刊名称Advanced Materials Research
- 作者Sun, Yi Hua; Li, Chen Hui; Xiong, Wei Hao; Huang, Cai Hua
- 电子ISSN1662-8985
- 文件大小1132.37KB
- 发表时间2011-7
- DOI10.4028/www.scientific.net/AMR.287-290.2308
- 页码2308-2313