The Electrical and Optical Properties of Al-Doped ZnO Thin Films Prepared by Atomic Layer Deposition
- 期刊名称Advanced Materials Research
- 作者Song, Jia; Mu, Hai Chuan; Jiang, Lai Xing; Yin, Gui Lin; Yu, Zhen; He, Dan Nong
- 电子ISSN1662-8985
- 文件大小3600.79KB
- 发表时间2011-8
- DOI10.4028/www.scientific.net/AMR.306-307.1402
- 页码1402-1405
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