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Transparent Conductive Cu-In-O Thin Films Deposited by Reactive DC Magnetron Sputtering with Different Targets

Transparent Conductive Cu-In-O Thin Films Deposited by Reactive DC Magnetron Sputtering with Different Targets

Ye, Fan; Cai, Xing Min; Dai, Fu Ping; Zhang, Dong Ping; Fan, Ping; Liu, Li Jun

期刊名称Advanced Materials Research
作者Ye, Fan; Cai, Xing Min; Dai, Fu Ping; Zhang, Dong Ping; Fan, Ping; Liu, Li Jun
电子ISSN1662-8985
文件大小316.86KB
发表时间2011-5
DOI10.4028/www.scientific.net/AMR.239-242.2752
页码2752-2755

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