Growth and characterization of yttrium oxide films by reactive magnetron sputtering
- 作者Jiaqi Zhu; Yuankun Zhu; Weixia Shen; Yongjie Wang; Jiecai Han; Gui Tian; Pei Lei; Bing Dai
- 卷第519卷
- 期第15期
- 印刷ISSN0040-6090
- 文件大小472.40KB
- 发表时间2011
- DOI10.1016/j.tsf.2011.01.049
- 页码4894-4898
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