Multilayer DLC coatings via alternating bias during magnetron sputtering
- 作者Fengji Li; Sam Zhang; Junhua Kong; Yujuan Zhang; Wali Zhang
- 卷第519卷
- 期第15期
- 印刷ISSN0040-6090
- 文件大小1713.17KB
- 发表时间2011
- DOI10.1016/j.tsf.2011.01.052
- 页码4910-4916
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