Numerical Simulation of 300mm CZ Silicon Crystal Growth with Axial Magnetic Fields
Xu, Wen Ting; Tu, Hai Ling; Chang, Qing; Xiao, Qing Hua; Dai, Xiao Lin; Liu, Yun Xia; Li, Zong Feng; Chang, Lin; Liu, Wei Da
- 期刊名称Materials Science Forum
- 作者Xu, Wen Ting; Tu, Hai Ling; Chang, Qing; Xiao, Qing Hua; Dai, Xiao Lin; Liu, Yun Xia; Li, Zong Feng; Chang, Lin; Liu, Wei Da
- 卷第689卷
- 电子ISSN1662-9752
- 文件大小641.21KB
- 发表时间2011-6
- DOI10.4028/www.scientific.net/msf.689.179
- 页码179-183