ECS Transactions [ECS 219th ECS Meeting - Montreal, QC, Canada (May 1 - May 6, 2011)] - Advanced Residual Stress Analysis on the Heteroepitaxial Growth of 3C-SiC/Si for MEMS Application
Anzalone, Ruggero; Camarda, Massimo; D'Arrigo, Giuseppe; Piluso, Nicolò; Severino, Andrea; Canino, Andrea; La Magna, Antonino; La Via, Francesco
- 作者Anzalone, Ruggero; Camarda, Massimo; D'Arrigo, Giuseppe; Piluso, Nicolò; Severino, Andrea; Canino, Andrea; La Magna, Antonino; La Via, Francesco
- 印刷ISSN1938-5862
- 文件大小296.46KB
- 发表时间2011
- DOI10.1149/1.3570853
- 页码123-131