Note: Creep character of piezoelectric actuator under switched capacitor charge pump control
Ma, Yu Ting; Huang, Liang; Liu, Yong Bin; Feng, Zhi Hua
- 期刊名称Review of Scientific Instruments
- 作者Ma, Yu Ting; Huang, Liang; Liu, Yong Bin; Feng, Zhi Hua
- 卷第82卷
- 期第4期
- 印刷ISSN0034-6748
- 文件大小372.37KB
- 发表时间2011
- DOI10.1063/1.3572267