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Low-Loss Amorphous Silicon Multilayer Waveguides Vertically Stacked on Silicon-on-Insulator Substrate

Kang, JoonHyun; Atsumi, Yuki; Oda, Manabu; Amemiya, Tomohiro; Nishiyama, Nobuhiko; Arai, Shigehisa

期刊名称Japanese Journal of Applied Physics
作者Kang, JoonHyun; Atsumi, Yuki; Oda, Manabu; Amemiya, Tomohiro; Nishiyama, Nobuhiko; Arai, Shigehisa
卷第50卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小180.30KB
发表时间2011-11-28
DOI10.1143/JJAP.50.120208