SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Monday 23 May 2011)] Optical Measurement Systems for Industrial Inspection VII - Dispersion optimized white-light interferometer based on a Schwarzschild objective
- 作者Kühnhold, Peter; Lehmann, Peter H.; Osten, Wolfgang; Lehmann, Peter; Niehues, Jan; Gastinger, Kay
- 卷第8082卷
- 印刷ISSN0277-786X
- 文件大小7446.65KB
- 发表时间2011
- DOI10.1117/12.889434
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