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Thermal Robustness and Improved Electrical Properties of Ultrathin Germanium Oxynitride Gate Dielectric

Kutsuki, Katsuhiro; Hideshima, Iori; Okamoto, Gaku; Hosoi, Takuji; Shimura, Takayoshi; Watanabe, Heiji

期刊名称Japanese Journal of Applied Physics
作者Kutsuki, Katsuhiro; Hideshima, Iori; Okamoto, Gaku; Hosoi, Takuji; Shimura, Takayoshi; Watanabe, Heiji
卷第50卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小775.99KB
发表时间2011-1-20
DOI10.1143/JJAP.50.010106