Analysis and suppression of spurious modes of the ring shape anchored RF MEMS contour mode disk resonator
- 作者Masoud Baghelani; Habib Badri Ghavifekr; Afshin Ebrahimi
- 卷第17卷
- 印刷ISSN0946-7076
- 电子ISSN1432-1858
- 文件大小2243.72KB
- 发表时间2011-10
- DOI10.1007/s00542-011-1352-5
- 页码1599-1609