Effects of composition and thermal annealing on the mechanical properties of silicon oxycarbide films
- 作者Ping Du; Xiaoning Wang; I.-Kuan Lin; Xin Zhang
- 卷第176卷
- 印刷ISSN0924-4247
- 文件大小1022.03KB
- 发表时间2012
- DOI10.1016/j.sna.2012.01.002
- 页码90-98
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