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Microstructure analysis of Ag films deposited by low-voltage sputtering

Microstructure analysis of Ag films deposited by low-voltage sputtering

Kazuhiro Kato; Hideo Omoto; Atsushi Takamatsu

作者Kazuhiro Kato; Hideo Omoto; Atsushi Takamatsu
卷第520卷
期第12期
印刷ISSN0040-6090
文件大小1029.35KB
发表时间2012
DOI10.1016/j.tsf.2011.06.051
页码4139-4143

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