Response function and optimum configuration of semiconductor backscattered-electron detectors for scanning electron microscopes
- 期刊名称Semiconductors
- 作者Rau, E. I.; Orlikovskiy, N. A.; Ivanova, E. S.
- 卷第46卷
- 期第6期
- 印刷ISSN1063-7826
- 电子ISSN1090-6479
- 文件大小201.21KB
- 发表时间2012-06
- DOI10.1134/s1063782612060139
- 页码810-813
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