Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers
- 作者Peihong Wang; Hejun Du; Shengnan Shen; Mingsheng Zhang; Bo Liu
- 卷第258卷
- 期第24期
- 印刷ISSN0169-4332
- 文件大小1162.05KB
- 发表时间2012
- DOI10.1016/j.apsusc.2012.04.158
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