The Role Played in the Improvement of the SiO2/SiC Interface by a Thin SiO2 Film Thermally Grown Prior to Oxide Film Deposition
- 期刊名称ECS Solid State Letters
- 作者Pitthan, E.; Palmieri, R.; Correa, S. A.; Soares, G. V.; Boudinov, H. I.; Stedile, F. C.
- 卷第2卷
- 期第1期
- 印刷ISSN2162-8742
- 电子ISSN2162-8750
- 文件大小576.42KB
- 发表时间2012-11-06
- DOI10.1149/2.008301ssl
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