Microfabrication of magnetically actuated PDMS–Iron composite membranes

• 期刊名称Microelectronic Engineering
• 作者Nanni, Gabriele; Petroni, Simona; Fragouli, Despina; Amato, Massimiliano; De Vittorio, Massimo; Athanassiou, Athanassia
• 卷第98卷
• 印刷ISSN0167-9317
• 文件大小425.71KB
• 发表时间2012-10
• DOI10.1016/j.mee.2012.05.052
• 页码607-609